Environmental sustainability and cost-efficiency were the main motivators for a research project conducted by our subsidiary Eco-Snow Systems™.
We realised this project in collaboration with the Belgian research centre IMEC.
Its purpose is to assess the effectiveness of cleaning electronic components with carbon dioxide ‘snow’ in conjunction with solvent-based, non-oxidising chemicals.
The aim is to establish a reliable and cost-effective method of removing photoresist after it has been implanted with high doses of ions without damaging exposed, nanoscale semiconductor structures on the wafers. This is a key technology with the power to enhance the manufacture of silicon-based electronic components.
Cleaning is an important process step to minimise the number of defective components due to foreign particles. The Eco-Snow™ system provides a reliable means of removing these particles without damaging the board.
In comparison with traditional wet cleaning, this Linde-engineered process is cost-effective and reduces environmental impact, as CO2 has lower global warming potential than the solvents previously used.
Two major MEMS (microelectromechanical systems) manufacturers have already installed Linde’s Eco-Snow™ system. MEMS components are used in a wide variety of applications, ranging from ink-jet printer heads to airbags.
| At a glance |
| Name: | Cleaning with CO2 |
| Country: | Global |
| Segment: | Electronics industry |
| More information: | Eco-Snow Systems |
